Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
نویسندگان
چکیده
منابع مشابه
Parallel-plate electrostatic actuation with vertical hinges
A microactuating structure with vertical polyimide hinges has been designed, fabricated and tested. Unlike traditional microactuators, which are located on the substrate surface, this new actuation mechanism is capable of producing linear motion at a point far from the substrate. This advantage can make it possible to drive other out-of-plane folded structures for on-wafer or out-of-wafer appli...
متن کاملDynamics of Polysilicon Parallel-plate Electrostatic Actuators
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at diierent bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100m 2 to 0:1mm 2) with long thin support beams (such as 60031:5m 3) are rotated oo the surface of the substrate to form a parallel-plate capacitor. Fabricated structures having 100m gaps can b...
متن کاملApplication of Thau Observer for Fault Detection of Micro Parallel Plate Capacitor Subjected to Nonlinear Electrostatic Force
This paper investigates the fault detection of a micro parallel plate capacitor subjected to nonlinear electrostatic force. For this end Thau observer, which has good ability in fault detection of nonlinear system has been presented and governing nonlinear dynamic equation of the capacitor has been presented. Upper and lower threshold for fault detection have been obtained. The robustness of th...
متن کاملA Low Voltage Electrostatic Micro Actuator for Large Out-of-plane Displacement
An electrostatic actuator is designed to move a 1 mm mirror, 58 μm out of plane at 25 volts. Large out-of-plane displacement is obtained from repulsive forces generated on four sets of comb drive fingers attached to the mirror plate in the middle. The proposed actuator is a customized design of a previous study for low voltage applications. The static modeling of the actuator was performed usin...
متن کاملAnalysis of Closed-Loop Control of Parallel-Plate Electrostatic MicroGrippers
A design of a high-force-output large-deeection parallel-plate electrostatically actuated microgripper is described. This design uses polysilicon as a structural material and may be fabricated using an IC-based surface machining process. This paper shows that by using a position feedback controller, this microgripper can be stabilized in theory, which is supported by computer simulations. Preli...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2005
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/15/7/015